JPH0567371B2 - - Google Patents
Info
- Publication number
- JPH0567371B2 JPH0567371B2 JP59153361A JP15336184A JPH0567371B2 JP H0567371 B2 JPH0567371 B2 JP H0567371B2 JP 59153361 A JP59153361 A JP 59153361A JP 15336184 A JP15336184 A JP 15336184A JP H0567371 B2 JPH0567371 B2 JP H0567371B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum suction
- suction
- suction device
- suction table
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 description 24
- 238000005498 polishing Methods 0.000 description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 239000012530 fluid Substances 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15336184A JPS6133831A (ja) | 1984-07-24 | 1984-07-24 | 真空吸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15336184A JPS6133831A (ja) | 1984-07-24 | 1984-07-24 | 真空吸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6133831A JPS6133831A (ja) | 1986-02-17 |
| JPH0567371B2 true JPH0567371B2 (en]) | 1993-09-24 |
Family
ID=15560771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15336184A Granted JPS6133831A (ja) | 1984-07-24 | 1984-07-24 | 真空吸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6133831A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997021243A1 (en) * | 1995-12-04 | 1997-06-12 | Hitachi, Ltd. | Method for processing semiconductor wafer, method for manufacturing ic card, and carrier |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4756295B2 (ja) * | 2000-11-09 | 2011-08-24 | 日本電気硝子株式会社 | ガラス板の吸着保持装置及び吸着保持方法 |
| JP4106977B2 (ja) * | 2002-06-21 | 2008-06-25 | 株式会社日立製作所 | 分析チップ及び分析装置 |
| GB2471712A (en) | 2009-07-10 | 2011-01-12 | De Beers Centenary AG | Gemstone alignment system |
| JP6506101B2 (ja) * | 2015-05-27 | 2019-04-24 | 京セラ株式会社 | 真空チャック部材および真空チャック部材の製造方法。 |
| JP7186356B2 (ja) * | 2019-01-16 | 2022-12-09 | 株式会社東京精密 | ウェーハチャック及びウェーハ保持装置 |
-
1984
- 1984-07-24 JP JP15336184A patent/JPS6133831A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997021243A1 (en) * | 1995-12-04 | 1997-06-12 | Hitachi, Ltd. | Method for processing semiconductor wafer, method for manufacturing ic card, and carrier |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6133831A (ja) | 1986-02-17 |
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